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Hydrogen
Diatomic gas (H2) employed as process gas in plasma processes. Owing to its low weight, hydrogen has got a poor sputtering effect, but a good effect in removing reducible surface layers, e. g. surface oxides on metals. Lightest of the chemical elements, consisting of one proton and one electron. The isotopes deuterium and tritium contain one and two additional neutrons in the nucleus, respectively.
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