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Magazine
For the treatment in plasma, small parts (e. g. ICs) can be positioned in particular supports, often comprising several levels, so-called magazines. This allows the optimal use of the chamber volume together with a defined position of every treated part. When contact between the parts during the plasma process should be avoided and for mechanically very sensitive parts, the employment of magazines should be preferred to the rotating drum method. Magazines are also employed to take up lead frames.
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