diener electronic : Mean free path length


	Mean free path length Average distance a gas molecule passes between two collisions with other gas molecules at a given temperature and pressure. Significant for the generation of a plasma: under too high pressure (too short mean free path), electrons and ions can not build up the necessary speed for ionising collisions, under too low pressure (too long mean free path) the number of ionising collisions is too small to sustain the plama. Furthermore, the mean free path length has a strong influence on the isotropy of etching processes: the higher the pressure, the shorter the free path length, the more isotropic is the material removal.

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